Zhang Ling and Kong Dejun Pages 140 - 143 ( 4 )
Background: Among the various technologies for the chemical vapor deposition of diamond, Microwave Plasma CVD (MPCVD) is a widely used technique for high quality diamond films. It has been proven that the growth rate and quality of diamond can be improved by increasing the plasma power density and gas pressure.Objective: The purpose of this paper is to describe a recently patented MPCVD method for depositing diamond films. Method: In this paper, a recently patented MPCVD method is analyzed from four aspects: theoretical background, principle of the application of MPCVD, diagram of MPCVD system and deposition parameters. Results: The patented MPCVD system and resulting diamond film improved the relative technology and put forward a helpful method of diamond film deposition. Conclusion: The MPCVD method improved the growth rate and quality of the deposited diamond film as a result of its changeable power and gas pressure. The diamond film prepared under these conditions was continuous and dense.
Cutting tools, diamond film, experimenetal system, MPCVD, surface quality, technological parameter.
College of Mechanical Engineering, Changzhou University, Changzhou 213164, College of Mechanical Engineering, Changzhou University, Gehu Road, Changzhou, Jiangsu Province